Room Temperature Organophosphate Detection by Thermally Oxidized Metal Oxide Thin Films

Abstract

In the present age, pesticides are used broadly in the unindustrialized sector in order to certify the safety of crops from pests and insects. This work mainly emphases on the evolution and chemical sensing nature of CuO thin films for organophosphate recognition. Cu films were deposited on p-type Si substrate [1–10 Ω cm (100),] using RF sputtering at 50 W power and 4×10-3 mbar pressure. Oxidation of the films was carried out in air atmosphere at a temperature range from 200 °C to 800 °C. The structural research were carried out by X-ray diffraction (XRD) technique. At a lower temperature of 200 ° combine phase of CuO and Cu2O was observed. The FESEM images have shown a even grainy surface pattern at the oxidation temperature of 600 °C without any presence of crashes. In order to study the sensing properties, current-voltage measurements were carried out in an secluded sensing chamber at room temperature. A substantial upsurge in current was observed for the oxidized films in presence of organophosphate pesticide.